Industry
ESD flooring for semiconductor and fab
Wafer handling, probe and assembly sit inside a controlled environment where the floor has to satisfy a particle class and a resistance band at once.
under 1.0 x 10^9ohmsANSI/ESD STM97.1
under 100voltsANSI/ESD STM97.2
2.5 x 10^4 to 1.0 x 10^6ohmsANSI/ESD STM7.1 / ASTM D257 (as cited on manufacturer TDS)
What is different about these rooms
01
Two specifications, one slab
ISO 14644-1 classification and an ESD resistance band are independent requirements. The class does not set the band and the band does not set the class.
02
Cleaning regimes fight ESD performance
A finish applied for particulate reasons sits between the floor and the ground path. The cleaning contract has to be written alongside the ESD program.
03
Tool moves are the wear pattern
Equipment install and moves abrade specific lanes hard. Those lanes are where the floor drops out of band first, so they are where reverification should focus.