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ESD flooring for semiconductor and fab

Wafer handling, probe and assembly sit inside a controlled environment where the floor has to satisfy a particle class and a resistance band at once.[1]

under 1.0 x 109ohmsANSI/ESD STM97.1
under 100voltsANSI/ESD STM97.2
2.5 x 104 to 1.0 x 106[7]ohmsANSI/ESD STM7.1 / ASTM D257 (as cited on manufacturer TDS)
ANSI/ESD S20.20 measures the person, their footwear and the floor as one circuit PERSONSHOES THE FLOOR, AND ITS PATH TO GROUND One circuit, measured end to end. Under 1.0 x 10⁹ ohms (STM97.1) Under 100 volts walking (STM97.2) Change the footwear and the reading changes, which is why the floor is never qualified alone.
S20.20 qualifies a system, not a surface. The person and their footwear are inside the measurement.

What is different about these rooms

01

Two specifications, one slab

ISO 14644-1 classification and an ESD resistance band are independent requirements. The class does not set the band and the band does not set the class.

02

Cleaning regimes fight ESD performance

A finish applied for particulate reasons sits between the floor and the ground path. The cleaning contract has to be written alongside the ESD program.

03

Tool moves are the wear pattern

Equipment install and moves abrade specific lanes hard. Those lanes are where the floor drops out of band first, so they are where reverification should focus.

Sources

Publishers cited on this page, and how many times each one is citedarcat.com1esda.org1
2 citations on this page, across 2 publishers. Every figure above is one of them.
  1. ANSI/ESD S20.20-2021, the ESD control program standard for electronics handling

    ESD control program requirements (administrative and technical) for any organization that handles ESD-sensitive electrical or electronic parts.

    www.esda.org
  2. Conductive and dissipative ESD epoxy technical data sheet, resistance and cure figures

    Cited here for the conductive flooring/coating resistance band. The ESD Association's own consumer-facing page states only the <= 1.0 x 106 ohm ceiling with no stated floor.

    www.arcat.com

Every number on this page came from one of those documents. Send us the room and we will tell you which of them your floor has to answer to.

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